Russell J. Low has been the CEO of Axcelis Technologies since May 2023. Before that, he served as Executive Vice President for Global Customer and Engineering Operations, and was critical in driving the company’s strategy for growth. He has over...

Russell J. Low has been the CEO of Axcelis Technologies since May 2023. Before that, he served as Executive Vice President for Global Customer and Engineering Operations, and was critical in driving the company’s strategy for growth. He has over 20 years of experience in the semiconductor industry, holding important roles at Veeco Instruments and Varian Semiconductor Equipment Associates. Dr. Low also sits on the North American Advisory Board of SEMI International and participates in the Massachusetts High Tech Council. In 2023, his total compensation reached $1.05 million, largely due to high performance metrics aligned with the company's growth. Under his leadership, Axcelis is focusing on expanding its market share and developing cutting-edge technologies within the semiconductor capital equipment sector. Dr. Low's strategic vision is becoming increasingly relevant in a time when semiconductor demand is soaring due to advancements in technology and the electrification of various industries.